Synthesis of nanodot arrays using self-assembled niobium oxide nanopillar mask by reactive ion etching

Synthesis of nanodot arrays using self-assembled niobium oxide nanopillar mask by reactive ion etching

著者名:

掲載資料名:

New developments and application in chemical reaction engineering : proceedings of the 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE '05) : Gyeongju, Korea, June 12-15, 2005

シリーズ名:

Studies in surface science and catalysis

シリーズ巻号:

159

発行年:

2006

開始ページ:

361

終了ページ:

364

総ページ数:

4

出版情報:

Amsterdam: Elsevier

ISSN:

01672991

ISBN:

9780444517333 [0444517332]

言語:

英語

請求記号:

S76950

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049489
シリーズID:	PA00000031
会議名:	the 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE '05)
回次:	4th
会議開催地:	Gyeongju, Korea
会議開催年:	2005.6.12-15

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