Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations

Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations

著者名:

Salvador Eslava

Christine E.A. Kirschhock

Johan A. Martens

さらに 3 件

掲載資料名:

Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1156

発行年:

2009

開始ページ:

53

終了ページ:

58

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111292 [1605111295]

言語:

英語

請求記号:

M23500/1156

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049468
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2009
会議開催地:	San Francisco, California, USA
会議開催年:	2009.04.14-2009.04.17

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