Multiple Duplication of Electroformed Nano-Ni Stamps from Si Mother Mold

Multiple Duplication of Electroformed Nano-Ni Stamps from Si Mother Mold

著者名:

掲載資料名:

Materials and devices for smart systems III : symposium held December 1-4, 2008, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1129

発行年:

2009

開始ページ:

103

終了ページ:

112

総ページ数:

10

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111018 [1605111015]

言語:

英語

請求記号:

M23500/1129

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049459
シリーズID:	PA00000011
会議名:	MRS Fall Meeting ; Symposium on Materials, Devices, and Characterization for Smart Systems
回次:	2008
会議開催地:	Boston, Massachusetts, USA
会議開催年:	2008.12.01-2008.12.04

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