Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators
- 著者名:
- 掲載資料名:
- 20th International Conference on Design Theory and Methodology : 2nd International Conference on Micro- and Nanosystems : presented at [the] 2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, August 3-6, 2008, New York City, New York, USA
- シリーズ名:
- ASME Symposia Volumes
- シリーズ巻号:
- DETC 2008(4)
- 発行年:
- 2008
- 巻:
- 4
- ペーパー番号:
- DETC2008-49731
- 開始ページ:
- 641
- 終了ページ:
- 646
- 総ページ数:
- 6
- 出版情報:
- New York: American Society of Mechanical Engineers
- ISBN:
- 9780791843284 [0791843289]
- 言語:
- 英語
- 請求記号:
- A11633/2008
- 資料種別:
- 国際会議録
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