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Large Area PECVD Coatings Using Linear Electron Beam Curtains

著者名:
  • A. Yializis ( Sigma Technologies International, Tucson, AZ )
  • G. Goodyear ( Sigma Technologies International, Tucson, AZ )
  • S.G. Walton ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
掲載資料名:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
51
発行年:
2008
開始ページ:
818
終了ページ:
821
総ページ数:
4
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/51
資料種別:
国際会議録

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