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An Investigation into the Properties of a Dual Source Pulsed Magnetron Sputtering System

著者名:
  • G.C.B. Clarke ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
  • A. Mishra ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
  • G.T. West ( Department of Biology, Chemistry and Health Science, Manchester Metropolitan University, Manchester, United Kingdom )
  • P.J. Kelly ( Department of Biology, Chemistry and Health Science, Manchester Metropolitan University, Manchester, United Kingdom )
  • J.W. Bradley ( Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, United Kingdom )
掲載資料名:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
51
発行年:
2008
開始ページ:
540
終了ページ:
544
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/51
資料種別:
国際会議録

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