Spectroscopic Ellipsometry Methods for Thin Absorbing Coatings

Spectroscopic Ellipsometry Methods for Thin Absorbing Coatings

著者名:

J.N. Hilfiker ( J.A. Woollam Company, Lincoln, NE )
R.A. Synowicki ( J.A. Woollam Company, Lincoln, NE )
H.G. Tompkins ( Consultant, Chandler, AZ )

掲載資料名:

51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

51

発行年:

2008

開始ページ:

511

終了ページ:

516

総ページ数:

6

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/51

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049388
シリーズID:	PA00000013
会議名:	Society of Vacuum Coaters. Annual technical conference
回次:	2008 : 51th
会議開催地:	Chicagom, IL, USA
会議開催年:	2008.04.19-2008.04.24

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2 国際会議録 Spectroscopic Ellipsometry in Optical Coatings Manufacturing J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, J.A. Woollam Society of Vacuum Coaters	8 国際会議録 Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper) Woollam, J.A., Bungay, C.L., Yan, L., Thompson, D.W., Hilfiker, J.N. SPIE-The International Society for Optical Engineering
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4 国際会議録 Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters	10 国際会議録 Thin Film Measurements by Spectroscopic Ellipsometry Over an Extended Range Cox, J.N., Hutchinson, J.M., Lee, K.K.D., Sheridan, B., Wong, R., Yang, I.-C.J. Electrochemical Society
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