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Closed Field Magnetron Sputter Deposition of Carbides and Nitrides for Optical Applications

著者名:
  • D.R. Gibson ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • I.T. Brinkley ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • E.M. Waddell ( Applied Multilayers Ltd., Coalville, United Kingdom )
  • J.M. Walls ( Applied Multilayers Ltd., Coalville, United Kingdom )
掲載資料名:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
51
発行年:
2008
開始ページ:
487
終了ページ:
491
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/51
資料種別:
国際会議録

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