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Eliminating Organic Contamination on Oxidized Si Surfaces Using Atomic Oxygen

著者名:
  • E. Strein ( Brigham Young University, Provo, UT )
  • D. Allred ( Brigham Young University, Provo, UT )
  • R.S. Turley ( Brigham Young University, Provo, UT )
掲載資料名:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
51
発行年:
2008
開始ページ:
448
終了ページ:
452
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/51
資料種別:
国際会議録

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