Progress on Gallium Nitride Semiconductor Growth by Plasma Sputtering
- 著者名:
- D.A. Baldwin ( 4Wave, Inc., Sterling, VA )
- J.C. Timler ( Glacier Semiconductor, Metarie, LA )
- D. Jena ( University of Notre Dame, South Bend, IN )
- 掲載資料名:
- 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 51
- 発行年:
- 2008
- 開始ページ:
- 140
- 終了ページ:
- 142
- 総ページ数:
- 3
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/51
- 資料種別:
- 国際会議録
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