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PECVD of SiOx Films with Electron Beam Generated Plasmas

著者名:
  • D. Leonhardt ( US Naval Research Laboratory, Plasma Physics Division, Washington, DC )
  • S.G. Walton ( US Naval Research Laboratory, Plasma Physics Division, Washington, DC )
掲載資料名:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
49
発行年:
2006
開始ページ:
389
終了ページ:
393
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/49
資料種別:
国際会議録

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