Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS)

Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS)

著者名:

J. Böhlmark ( Chemfilt Ionsputtering AB, Linköping, Sweden and Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden )

M. Lattemann ( Plasma & Coatings Physics, IEM Material Physics, Linköping University, Linköping, Sweden )

H. Stranning ( Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden and AB Sandvik Tooling, Stockholm, Sweden )

T. Selinder ( AB Sandvik Tooling, Stockholm, Sweden )

J. Carlsson ( Chemfilt lonsputtering AB, Linköping, Sweden )

U. Helmersson ( Plasma & Coatings Physics, IFM Material Physics, Linköping University, Linköping, Sweden )

さらに 1 件

掲載資料名:

49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

49

発行年:

2006

開始ページ:

334

終了ページ:

337

総ページ数:

4

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/49

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049387
シリーズID:	PA00000013
会議名:	Society of Vacuum Coaters. Annual technical conference
回次:	2006 : 49th
会議開催地:	Washington, D.C. USA
会議開催年:	2006.04.22-2006.04.27

類似資料:

1 国際会議録 High Power Impulse Magnetron Sputtering Discharges and Thin Film Growth: A Brief Review U. Helmersson, M. Lattemann, J. Alami, J. Bohlmark, A.P. Ehiasarian, J.T. Gudmundsson Society of Vacuum Coaters	7 国際会議録 Comparison of TiN Thin Films Grown on SiO₂ by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering F. Magnus, A. S. Ingason, O. B. Sveinsson, S. Olafsson, J. T. Gudmundsson Materials Research Society
2 国際会議録 High Power Impulse Magnetron Sputtering (HIPIMS) Pre-treatment for the Deposition of Hard Coatings A.P. Ehiasarian, P.Eh. Hovsepian, M. Lattemann, J. Böhlmark, U. Helmersson Society of Vacuum Coaters	8 国際会議録 SEMI-COHERENT YTTRIA INCLUSIONS OCCURRING SPONTANEOUSLY IN YBa2Cu3O6+X FILMS GROWN BY DC MAGNETRON SPUTTERING Selinder, T. I., Han, Z., Helmersson, U., Magnusson, J., Norling, P., Svedlindh, P. Materials Research Society
3 国際会議録 Low-Temperature Hysteresis-Free Reactive Deposition of α-Alumina Coatings Using High Power Impulse Magnetron Sputtering E. Wallin, T.I. Selinder, M. Elfwing, U. Helmersson Society of Vacuum Coaters	9 国際会議録 Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering F. Magnus, B. Agnarsson, A.S. Ingason, K. Leosson, S. Olafsson, J.T. Gudmundsson Materials Research Society
4 国際会議録 The Ion Energy Distributions in a High Power Impulse Magnetron Plasma J. Bohlmark, A.P. Ehiasarian, M. Lattemann, J. Alami, U. Helmersson Society of Vacuum Coaters	10 国際会議録 Optical Emission Study of the Ionization Fractions in a High Power Pulsed Magnetron Plasma J. Böhlmark, A.P. Ehiasarian, P.Eh. Hovsepian, U. Helmersson Society of Vacuum Coaters
5 国際会議録 Influence of Pressure and Power on the Composition and Time Evolution of Plasmas in High Power Impulse Magnetron Sputtering A.P. Ehiasarian, R. New, P.Eh. Hovsepian, J. Böhlmark, J. Alami, U. Helmersson Society of Vacuum Coaters	11 国際会議録 Industrial-Scale Production of Corrosion-Resistant CrN/NbN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering Etching Unbalanced … A.P. Ehiasarian, C. Reinhard, P.Eh. Hovsepian, J.M. Colton Society of Vacuum Coaters
6 国際会議録 High Power Impulse Magnetron Sputtering for Industrial Applications: Deposition of Chromium Films on Inclined Surfaces G. Greczynski, J. Böhlmark, Y.T. Pei, C.Q. Chen, J.T.M. De Hosson, M. Alunovic, R. Cremer Society of Vacuum Coaters	12 国際会議録 CrN Deposition by Reactive High-Power Density Pulsed Magnetron Sputtering A.P. Ehiasarian, W.-D. Manz, L. Hultman, U. Helmersson Society of Vacuum Coaters

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