Blank Cover Image

The High Power Impulse Magnetron Sputtering Discharge: The Ionization Mechanism

著者名:
J.T Gudmundsson ( Science Institute and Department of Electrical and Computer Engineering, University of. Iceland, Reykiavik, Iceland )  
掲載資料名:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
49
発行年:
2006
開始ページ:
329
終了ページ:
333
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/49
資料種別:
国際会議録

類似資料:

1 国際会議録 High Power Impulse Magnetron Sputtering Discharges and Thin Film Growth: A Brief Review

U. Helmersson, M. Lattemann, J. Alami, J. Bohlmark, A.P. Ehiasarian, J.T. Gudmundsson

Society of Vacuum Coaters
7 国際会議録 Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS)

J. Böhlmark, M. Lattemann, H. Stranning, T. Selinder, J. Carlsson, U. Helmersson

Society of Vacuum Coaters
2 国際会議録 Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering

F. Magnus, B. Agnarsson, A.S. Ingason, K. Leosson, S. Olafsson, J.T. Gudmundsson

Materials Research Society
8 国際会議録 Deposition Rates of High Power Impulse Magnetron Sputtering

A. Anders

Society of Vacuum Coaters
3 国際会議録 Comparison of TiN Thin Films Grown on SiO2 by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering

F. Magnus, A. S. Ingason, O. B. Sveinsson, S. Olafsson, J. T. Gudmundsson

Materials Research Society
9 国際会議録 Industrial Size High Power Impulse Magnetron Sputtering

A.R Ehiasarian, R. Bugyi

Society of Vacuum Coaters
4 国際会議録 High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Thin Films

J. Vlcek, A.D. Pajdarova, P. Belsky, M. Kormunda, J. Lestina, J. Musil

Society of Vacuum Coaters
10 国際会議録 Influence of Pressure and Power on the Composition and Time Evolution of Plasmas in High Power Impulse Magnetron Sputtering

A.P. Ehiasarian, R. New, P.Eh. Hovsepian, J. Böhlmark, J. Alami, U. Helmersson

Society of Vacuum Coaters
5 国際会議録 Characterization of High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Copper Films

J. Vlcek, A.D. Pajdarova, P. Belsky, J. Lukas, P. Kudlacek, J. Musil

Society of Vacuum Coaters
11 国際会議録 Low-Temperature Hysteresis-Free Reactive Deposition of α-Alumina Coatings Using High Power Impulse Magnetron Sputtering

E. Wallin, T.I. Selinder, M. Elfwing, U. Helmersson

Society of Vacuum Coaters
6 国際会議録 High Power Impulse Magnetron Sputtering for Industrial Applications: Deposition of Chromium Films on Inclined Surfaces

G. Greczynski, J. Böhlmark, Y.T. Pei, C.Q. Chen, J.T.M. De Hosson, M. Alunovic, R. Cremer

Society of Vacuum Coaters
12 国際会議録 Deposition Flux Characteristics near the Substrate in High Power Impulse Magnetron Sputtering

A.P. Ehiasarian, A. Hecimovic, A. Vetushka, S. Konstantinidis

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12