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Plasma-Assisted Atomic Layer Deposition of Al₂O₃ on Polymers

著者名:
  • E. Langereis ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • S.B.S. Heil ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M. Creatore ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M.C.M. van de Sanden ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • W.M.M. Kessels ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
掲載資料名:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
49
発行年:
2006
開始ページ:
151
終了ページ:
156
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/49
資料種別:
国際会議録

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