Flexible Organic Electronics: The Role of Plasma Deposition in Multi-layer Permeation Barrier Technology

Flexible Organic Electronics: The Role of Plasma Deposition in Multi-layer Permeation Barrier Technology

著者名:

M. Creatore ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
V.I.T.A. Lohmann ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
M.A. Blauw ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
M.C.M. van de Sanden ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )

掲載資料名:

49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

49

発行年:

2006

開始ページ:

143

終了ページ:

146

総ページ数:

4

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/49

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049387
シリーズID:	PA00000013
会議名:	Society of Vacuum Coaters. Annual technical conference
回次:	2006 : 49th
会議開催地:	Washington, D.C. USA
会議開催年:	2006.04.22-2006.04.27

類似資料:

1 国際会議録 Permeation Barrier Coatings for Flexible Electronics and Polymer/Inorganic Layer Interphase Development in an Expanding Thermal Plasma M. Creatore, V.I.T.A. Lohmann, C.G. Klaasse Bos, A.C.M. Hamelinck, M.M. Koetse, H.F.M. Schoo, M.C.M. van de Sanden Society of Vacuum Coaters	7 国際会議録 Expanding Thermal Plasma Deposition Of Silicon Dioxide-Like Films For Microelectronic Devices Creatore, M., Hest, M.F.A.M. van, Benedikt, J., Sanden, M.C.M. van de Materials Research Society
2 国際会議録 Ion Flux Measurements in a Remote High Rate Depositing Plasma Using a Pulse Shape Capacitive Probe M.C. Petcu, A.C. Bronneberg, M.A. Blauw, M. Creatore, M.C.M. van de Sanden Society of Vacuum Coaters	8 国際会議録 Ultra-High Barrier Coatings for Flexible Organic Electronics A.G. Erlat, M. Yan, T.W. Kim, M. Schaepkens, J. Liu, C.M. Heller, P. McConnelee, T. Feist, A.R. Duggal Society of Vacuum Coaters
3 国際会議録 Plasma-Assisted Atomic Layer Deposition of Al₂O₃ on Polymers E. Langereis, S.B.S. Heil, M. Creatore, M.C.M. van de Sanden, W.M.M. Kessels Society of Vacuum Coaters	9 国際会議録 Industrial Implementation of Plasma Deposition Using the Expanding Thermal Plasma Technique M.C.M. van de Sanden, P.J. van den Oever, M. Creatore, M. Schaepkens, T. Miebach, C.D. Iacovangelo, R.C.M. Bosch, M. … Society of Vacuum Coaters
4 国際会議録 Expanding thermal plasma CVD: Experimental studies of the plasma-surface interaction Van de Sanden, M. C. M., Creatore, M., Blauw, M. A., Hoefiiagels, J. P. M., Hoex, B., van den Oever, P. J., Smets, A. H. … Electrochemical Society	10 国際会議録 Deposition of TiN and TaN by Remote Plasma ALD for Diffusion Barrier Applications H. Knoops, L. Baggetto, E. Langereis, M.C.M. Van de Sanden, J.H. Klootwijk Electrochemical Society
5 国際会議録 Expanding Thermal Plasma for Low-k Dielectrics Deposition Creatore, M., Barrell, Y., Kessels, W. M. M., Sanden, M. C. M. van de Materials Research Society	11 国際会議録 Real-Time Growth Studies on the Expanding Thermal Plasma Deposited ZnO Films by Means of In Situ Spectroscopic Ellipsometry I.Volintiru, M. Creatore, J.L. Linden, M.C.M. van de Sanden Society of Vacuum Coaters
6 国際会議録 High-Rate Anisotropic Silicon Etching with the Expanding Thermal Plasma Technique M.A. Blauw, P. Van Lankvelt, F. Roozeboom, E. Kessels, R. van de Sanden Electrochemical Society	12 国際会議録 Characterization of Multi-Layer permeation Barriers Made by Microwave Plasma Polymerization Dahlmann, R., Michaeli, W. Society of Plastics Engineers, Inc. (SPE)

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