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Characterization of High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Copper Films

著者名:
J. Vlcek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
A.D. Pajdarova ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
P. Belsky ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Lukas ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
P. Kudlacek ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
J. Musil ( Department of Physics, University of West Bohemia, Plzen, Czech Republic )
さらに 1 件
掲載資料名:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
48
発行年:
2005
開始ページ:
465
終了ページ:
469
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/48
資料種別:
国際会議録

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