High Power Impulse Magnetron Sputtering Discharges and Thin Film Growth: A Brief Review

High Power Impulse Magnetron Sputtering Discharges and Thin Film Growth: A Brief Review

著者名:

U. Helmersson ( Linköping University, Linköping, Sweden )

M. Lattemann ( Linköping University, Linköping, Sweden )

J. Alami ( Linköping University, Linköping, Sweden )

J. Bohlmark ( Linköping University, Linköping, Sweden )

A.P. Ehiasarian ( Sheffield Hallam University, Sheffield, UK )

J.T. Gudmundsson ( University of Iceland, Reykjavík, Iceland )

さらに 1 件

掲載資料名:

48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

48

発行年:

2005

開始ページ:

458

終了ページ:

464

総ページ数:

7

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/48

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049386
シリーズID:	PA00000013
会議名:	Society of Vacuum Coaters. Annual technical conference
回次:	2005 : 48th
会議開催地:	Denver, Colorado USA
会議開催年:	2005.04.23-2005.04.28

類似資料:

1 国際会議録 The Ion Energy Distributions in a High Power Impulse Magnetron Plasma J. Bohlmark, A.P. Ehiasarian, M. Lattemann, J. Alami, U. Helmersson Society of Vacuum Coaters	7 国際会議録 Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering F. Magnus, B. Agnarsson, A.S. Ingason, K. Leosson, S. Olafsson, J.T. Gudmundsson Materials Research Society
2 国際会議録 High Power Impulse Magnetron Sputtering (HIPIMS) Pre-treatment for the Deposition of Hard Coatings A.P. Ehiasarian, P.Eh. Hovsepian, M. Lattemann, J. Böhlmark, U. Helmersson Society of Vacuum Coaters	8 国際会議録 CrN Deposition by Reactive High-Power Density Pulsed Magnetron Sputtering A.P. Ehiasarian, W.-D. Manz, L. Hultman, U. Helmersson Society of Vacuum Coaters
3 国際会議録 Influence of Pressure and Power on the Composition and Time Evolution of Plasmas in High Power Impulse Magnetron Sputtering A.P. Ehiasarian, R. New, P.Eh. Hovsepian, J. Böhlmark, J. Alami, U. Helmersson Society of Vacuum Coaters	9 国際会議録 Deposition Flux Characteristics near the Substrate in High Power Impulse Magnetron Sputtering A.P. Ehiasarian, A. Hecimovic, A. Vetushka, S. Konstantinidis Society of Vacuum Coaters
4 国際会議録 Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS) J. Böhlmark, M. Lattemann, H. Stranning, T. Selinder, J. Carlsson, U. Helmersson Society of Vacuum Coaters	10 国際会議録 Industrial-Scale Production of Corrosion-Resistant CrN/NbN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering Etching Unbalanced … A.P. Ehiasarian, C. Reinhard, P.Eh. Hovsepian, J.M. Colton Society of Vacuum Coaters
5 国際会議録 The High Power Impulse Magnetron Sputtering Discharge: The Ionization Mechanism J.T Gudmundsson Society of Vacuum Coaters	11 国際会議録 Comparison of TiN Thin Films Grown on SiO₂ by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering F. Magnus, A. S. Ingason, O. B. Sveinsson, S. Olafsson, J. T. Gudmundsson Materials Research Society
6 国際会議録 Optical Emission Study of the Ionization Fractions in a High Power Pulsed Magnetron Plasma J. Böhlmark, A.P. Ehiasarian, P.Eh. Hovsepian, U. Helmersson Society of Vacuum Coaters	12 国際会議録 High Power Impulse Magnetron Sputtering for Industrial Applications: Deposition of Chromium Films on Inclined Surfaces G. Greczynski, J. Böhlmark, Y.T. Pei, C.Q. Chen, J.T.M. De Hosson, M. Alunovic, R. Cremer Society of Vacuum Coaters

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