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Low-Energy End-Hall Ion Source Characterization at Millitorr Pressures

著者名:
  • J.R. Kahn ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • H.R. Kaufman ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • R.E. Nethery ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • R.S. Robinson ( Colorado State University, Fort Collins, CO )
  • C.M. Shonka ( Kaufman & Robinson, Inc., Fort Collins, CO )
掲載資料名:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
48
発行年:
2005
開始ページ:
445
終了ページ:
451
総ページ数:
7
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/48
資料種別:
国際会議録

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