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Super Smooth Metal Oxide Thin Films Using Closed Field Reactive Magnetron Sputtering

著者名:
  • J.M. Walls ( Applied Multilayers Ltd., Leicestershire, United Kingdom )
  • I.T. Brinkley ( Applied Multilayers Ltd., Leicestershire, United Kingdom )
  • D.R. Gibson ( Applied Multilayers Ltd., Leicestershire, United Kingdom )
  • E.M. Waddell ( Applied Multilayers Ltd., Leicestershire, United Kingdom )
掲載資料名:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
48
発行年:
2005
開始ページ:
370
終了ページ:
374
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/48
資料種別:
国際会議録

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