Recent Advances in Optical Characterization of Thin Films by Spectroscopic Ellipsometry
- 著者名:
- D.E. Aspnes ( Physics Dept., North Carolina State University, Raleigh, NC )
- 掲載資料名:
- 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 48
- 発行年:
- 2005
- 開始ページ:
- 337
- 終了ページ:
- 340
- 総ページ数:
- 4
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/48
- 資料種別:
- 国際会議録
類似資料:
American Chemical Society |
Trans Tech Publications |
2
国際会議録
Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
4
国際会議録
In-Line Characterization Of Thin Poly silicon Films By Variable Angle Spectroscopic Ellipsometry
Materials Research Society |
SPIE - The International Society of Optical Engineering |
North-Holland |
SPIE - The International Society for Optical Engineering |