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Modular Linear Ion Source

著者名:
  • H.R. Kaufman ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • J.R. Kahn ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • R.E. Nethery ( Kaufman & Robinson, Inc., Fort Collins, CO )
掲載資料名:
47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
47
発行年:
2004
開始ページ:
477
終了ページ:
482
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/47
資料種別:
国際会議録

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