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Substrate Heating Using Several Configurations of an End-Hall Ion Source

著者名:
  • J.R. Kahn ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • H.R. Kaufman ( Kaufman & Robinson, Inc., Fort Collins, CO )
  • V.V. Zhurin ( Kaufman & Robinson, Inc., Fort Collins, CO )
掲載資料名:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
46
発行年:
2003
開始ページ:
621
終了ページ:
625
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/46
資料種別:
国際会議録

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