Magnetron as Cathode-Neutralizer for Ion Source in Ion-Assisted Operation
- 著者名:
- V.V. Zhurin ( Kaufman & Robinson, Inc., Fort Collins, CO )
- H.R. Kaufman ( Kaufman & Robinson, Inc., Fort Collins, CO )
- J.R. Kahn ( Kaufman & Robinson, Inc., Fort Collins, CO )
- K.A. Thompson ( Kaufman & Robinson, Inc., Fort Collins, CO )
- 掲載資料名:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 46
- 発行年:
- 2003
- 開始ページ:
- 442
- 終了ページ:
- 446
- 総ページ数:
- 5
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/46
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
Materials Research Society |
Society of Vacuum Coaters |
Society of Vacuum Coaters |
Society of Vacuum Coaters |
MRS - Materials Research Society |
Society of Vacuum Coaters |
ESA Publications Division |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Materials Research Society |
SPIE - The International Society for Optical Engineering |