Correlation Between Optical and Mass Spectrometry Characterization of an Atomic Nitrogen Source for Reactive Magnetron Sputtering
- 著者名:
- T. Godfroid ( Universite de Mons-Hainaut, Mons, Belgium )
- J.-P. Dauchot ( Universite de Mons-Hainaut, Mons, Belgium )
- M. Hecq ( Universite de Mons-Hainaut, Mons, Belgium )
- 掲載資料名:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 46
- 発行年:
- 2003
- 開始ページ:
- 108
- 終了ページ:
- 113
- 総ページ数:
- 6
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/46
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
Kluwer Academic Publishers |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
9
国際会議録
Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering
Society of Vacuum Coaters |
MRS - Materials Research Society | |
MRS - Materials Research Society |
Materials Research Society |
Trans Tech Publications |
MRS - Materials Research Society |