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PECVD of SiOx Barrier Films

著者名:
  • A.W. Smith ( Valmet General, Ltd., Heywood, United Kingdom )
  • N. Copeland ( Valmet General, Ltd., Heywood, United Kingdom )
  • D. Gerrerd ( Valmet General, Ltd., Heywood, United Kingdom )
  • D. Nicholas ( Valmet General, Ltd., Heywood, United Kingdom )
掲載資料名:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
45
発行年:
2002
開始ページ:
525
終了ページ:
529
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/45
資料種別:
国際会議録

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