Ion Flux Measurements in Electron Beam-Generated Plasmas

Ion Flux Measurements in Electron Beam-Generated Plasmas

著者名:

S.G. Walton ( SFA, Inc., Largo, MD )
D. Leonhardt ( Naval Research Laboratory, Washington, DC )
R.F. Fernsler ( Naval Research Laboratory, Washington, DC )
R.A. Meger ( Naval Research Laboratory, Washington, DC )

掲載資料名:

45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

45

発行年:

2002

開始ページ:

378

終了ページ:

383

総ページ数:

6

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/45

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049383
シリーズID:	PA00000013
会議名:	Annual Technical Conference Proceedings
回次:	2002
会議開催地:	Lake Buena Vista, Florida USA
会議開催年:	2002.04.13-2002.04.18

類似資料:

1 国際会議録 Materials Processing in Electron Beam-Generated Plasmas C. Muratore, S.G. Walton, D. Leonhardt, R.F. Fernsler, R.A. Meger Society of Vacuum Coaters	7 国際会議録 Controlling the Incident Ion Energy at Substrate Surfaces S.G. Walton, R.F. Fernsler, E.H. Lock Society of Vacuum Coaters
2 国際会議録 Characterizations of Electron Beam-Generated Plasmas S.G. Walton, D. Leonhardt, R.F. Fernsler, R.A. Meger, D.D. Blackwell, C. Muratore Society of Vacuum Coaters	8 テクニカルペーパー Use of a planar plasma distribution for radar beam steering Meger, R.A., Fernsler, R.F., Manheimer, W.M., Mathew, J., Murphy, D.P., Myers, M.C., Pechacek, R.E. American Institute of Aeronautics and Astronautics
3 国際会議録 Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen S.G. Walton, D. Leonhardt, R.F. Fernsler Society of Vacuum Coaters	9 国際会議録 Large Area PECVD Coatings Using Linear Electron Beam Curtains A. Yializis, G. Goodyear, S.G. Walton Society of Vacuum Coaters
4 国際会議録 Plasma Processing System Based on Electron Beam Ionization D. Leonhardt, M.M. Balkey, R.F. Fernsler, R.A. Meger, D.P. Murphy, S.G. Walton, D.D. Blackwell Society of Vacuum Coaters	10 国際会議録 Electron and ion beam-enhanced adhesion Mitchell, I. V., Williams, J. S., Sood, D. K., Short, K. T., Johnson, S., Elliman, R. G. North-Holland
5 国際会議録 PECVD of SiOx Films with Electron Beam Generated Plasmas D. Leonhardt, S.G. Walton Society of Vacuum Coaters	11 国際会議録 Electron-beam transmission properties in plasma channel Xie, W.K., Chen, X., Meng, L., Gao, X.Y., Liu, S.G. SPIE-The International Society for Optical Engineering
6 国際会議録 Deposition of Silicon Dioxide Films Using Electron Beam-Generated Plasmas S.G. Walton, D. Leonhardt Society of Vacuum Coaters	12 国際会議録 Plasma-Based Chemical Modification of Epitaxial Graphene S.G. Walton, S.C. Hernández, M. Baraket, V.D. Wheeler, L.O. Nyakiti Trans Tech Publications

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