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Properties of TCO-Films Prepared by Reactive Magnetron Sputtering

著者名:
B. Szyszka ( Fraunhofer IST, Germany )  
掲載資料名:
43rd Annual Technical Conference proceedings, April 15-20, 2000, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
43
発行年:
2000
開始ページ:
187
終了ページ:
192
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/43
資料種別:
国際会議録

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