Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films

Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films

著者名:

William Hunks

掲載資料名:

Materials science and technology for nonvolatile memories : symposium held March 24-27, 2008, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1071

発行年:

2008

開始ページ:

193

終了ページ:

200

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110417 [1605110418]

言語:

英語

請求記号:

M23500/1071

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049374
シリーズID:	PA00000011
会議名:	Materials Research Society Meeting ; Symposium on Materials Science and Technology for Nonvolatile memories
回次:	2008
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2008.05.24-2008.05.27

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