Modeling of Effect of Stress on C Diffusion/Clustering in Si

Modeling of Effect of Stress on C Diffusion/Clustering in Si

著者名:

掲載資料名:

Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1070

発行年:

2008

開始ページ:

129

終了ページ:

134

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110400 [160511040X]

言語:

英語

請求記号:

M23500/1070

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049373
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2008
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2008.05.25-2008.05.27

類似資料:

1 国際会議録 Modeling of Cu Surface Precipitation and Out-Diffusion From Silicon Wafers Hsiu-Wu Guo, Scott T. Dunham Materials Research Society	7 国際会議録 Modeling of Dislocation Loop Growth and Transient-Enhanced Diffusion in Silicon for Amorphizing Implants Gencer, Alp H., Dunham, Scott T. MRS - Materials Research Society
2 国際会議録 Predictive Model for B Diffusion in Strained SiGe Based on Atomistic Calculations Chihak Ahn, Jakyoung Song, Scott T. Dunham Materials Research Society	8 国際会議録 Modeling of Dislocation Loop Growth and Transient Enhanced Diffusion in Silicon for Amorphizing Implants Gencer, Alp H., Dunham, Scott T. MRS - Materials Research Society
3 国際会議録 Stress Effects on As Activation in Si Chihak Ahn, Scott T. Dunham Materials Research Society	9 国際会議録 MODELING OF PHOSPHORUS DIFFUSION IN SILICON Dunham, S.T. Electrochemical Society
4 国際会議録 Atomistic Modeling of {311} Defects and Dislocation Ribbons Bart Trzynadlowski, Scott Dunham, Chihak Ahn Materials Research Society	10 国際会議録 Molecular Dynamics Modeling of Stress and Orientation Dependence Solid Phase Epitaxial Regrowth Haoyu Lai, Stephen M. Cea, Harold Kennel, Scott T. Dunham Materials Research Society
5 国際会議録 Low Temperature Poly-Si Sputtering Deposition Through Metal-induced Crystallization and Its Application Hsiu-Wu Guo, Chen-Luen Shih, Joe Ketterl, Scott Dunham Materials Research Society	11 国際会議録 Point Defect Properties From Metal Diffusion Experiments-What Does the Data Really Tell Us? Chakravarthi, Srinivasan, Dunham, Scott T. MRS - Materials Research Society
6 国際会議録 MODELING OF DOPANT DIFFUSION DURING ANNEALING OF SUB-AMORPHIZING IMPLANTS Dunham, Scott MRS - Materials Research Society	12 国際会議録 Atomistic Simulations of Effect of Coulombic Interactions on Carrier Fluctuations in Doped Silicon Qin, Zudian, Dunham, Scott T. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12