Effect of Annealing Temperature on SiC Wafer Bow and Warp

Effect of Annealing Temperature on SiC Wafer Bow and Warp

著者名:

掲載資料名:

Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1069

発行年:

2008

開始ページ:

101

終了ページ:

108

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110394 [1605110396]

言語:

英語

請求記号:

M23500/1069

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049372
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2008
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2008.05.25-2008.05.27

類似資料:

1 国際会議録 Improvement of SiC Wafer Warp by Annealing Sasaki, M., Harada, S., Okamoto, Y., Kinoshita, H., Miyanagi, Y., Shiomi, H. Trans Tech Publications	7 国際会議録 Background Impurity Reduction and Iron Doping of Gallium Nitride wafers Vaudo, Robert P., Xu, Xueping, Salant, Allan D., Malcarne, Joseph A., Hutchins, Edward L., Brandes, George R. Materials Research Society
2 国際会議録 Growth of Large Diameter 6H SI and 4H n+ SiC Single Crystals Avinash Gupta, Ping Wu, Varatharajan Rengarajan, Xueping Xu, Murugesu Yoganathan, Chris Martin, Ejiro Emorhokpor, Andy … Materials Research Society	8 国際会議録 Effect of Implantation Temperature on Redistribution of Al in SiC during Annealing Usov, I.O., Suvorova, A.A., Suvorov, A.V. Trans Tech Publications
3 国際会議録 The Effect of Epitaxial Growth on Warp of SiC Wafers Nakayama, K., Miyanagi, Y., Maruyama, K., Okamoto, Y., Shiomi, H., Nishino, S. Trans Tech Publications	9 国際会議録 Carbon Nanotube-Based Vacuum Microelectronic Gated Cathode Xu, Xueping, Brandes, George R. MRS - Materials Research Society
4 国際会議録 The Effect of Epitaxial Growth on Warp of SiC Wafers Nakayama, K., Miyanagi, Y., Maruyama, K., Okamoto, Y., Shiomi, H., Nishino, S. Trans Tech Publications	10 国際会議録 The Study of High Temperature Annealing of a-SiC:H Films Zhang, S., Hu, Z., Raniero, L., Liao, X., Ferreira, I., Fortunato, E., Vilarinho, P.M., Pereira, L., Martins, R. Trans Tech Publications
5 国際会議録 Propagation and Density Reduction of Threading Dislocations in SiC Crystals during Sublimation Growth Ping Wu, Xueping Xu, Varatharajan Rengarajan, Ilya Zwieback Materials Research Society	11 国際会議録 EFFECT OF HIGH TEMPERATURE ANNEALING ON THE MICROSTRUCTURE OF SCS-6 SIC FIBERS Ning, X.J., Pirouz, P., Bhatt, R.T. Materials Research Society
6 国際会議録 Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress R. Anzalone, M. Camarda, A. Auditore, N. Piluso, A. Severino Trans Tech Publications	12 国際会議録 Design and analysis of bow-tie aperture with strong near-field enhancement effect Xu, J., Wang, J., Tian, Q. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12