Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers

Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers

著者名:

Charles W Teplin

掲載資料名:

Amorphous and polycrystalline thin-film silicon science and technology--2008 : symposium held March 25-28, 2008, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1066

発行年:

2008

開始ページ:

285

終了ページ:

292

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110363 [1605110361]

言語:

英語

請求記号:

M23500/1066

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049370
シリーズID:	PA00000011
会議名:	Materials Research Society meeting ; Symposium on amorphous and polycrystalline thin-film silicon science and technology
回次:	2008
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2008.05.25-2008.05.28

類似資料:

1 国際会議録 Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins, Stefan Gall Materials Research Society	7 国際会議録 Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films Young, David L., Stradins, Paul, Iwaniczko, Eugene, To, Bobby, Reedy, Bob, Yan, Yanfa, Branz, Howard M., Lohr, John, … Materials Research Society
2 国際会議録 Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600℃: Epitaxial and Polycrystalline Silicon Films Charles W. Teplin, Howard M. Branz, Kim M. Jones, Bobby To, Eugene Iwaniczko, Paul Stradins Materials Research Society	8 国際会議録 Cone Kinetics Model: Insights into the Morphologies of Mixed-phase Silicon Film Growth Howard M. Branz, Paul Stradins, Charles W. Teplin Materials Research Society
3 国際会議録 Silicon Homoepitaxy Using Tantalum-Filament Hot-Wire Chemical Vapor Deposition Teplin, Charles W., Iwaniczko, Eugene, Jones, Kim M., Reedy, Robert, To, Bobby, Branz, Howard M. Materials Research Society	9 国際会議録 The Growth of Homoepitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition Thiesen, J., Jones, K. M., Matson, R., Reedy, R., Iwaniczko, E., Mahan, H., Crandall, R. MRS - Materials Research Society
4 国際会議録 Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition Charles W. Teplin, Matthew W. Page, Eugene W. Iwaniczko, Kim M. Jones, Robert M. Ready, Bobby M. To, Helio M. Moutinho, … Materials Research Society	10 国際会議録 Real Time Monitoring of the Crystallization of Hydrogenated Amorphous Silicon Stradins, Paul, Young, David, Branz, Howard M., Page, Matthew, Wang, Qi Materials Research Society
5 国際会議録 Physics of Solid-Phase Epitaxy of Hydrogenated Amorphous Silicon for Thin Film Si Photovoltaics Paul Stradins, Yanfa Yan, Robert Reedy, David L. Young, Charles W. Teplin, Eugene Iwaniczko, Yueqin Xu, Kim Jones, Glenn … Materials Research Society	11 国際会議録 Predicting Growth Rates of SiC Epitaxial Layers Grown by Hot-Wall Chemical Vapor Deposition Danielsson, O., Jonsson, S., Henry, A., Janzen, E. Trans Tech Publications
6 国際会議録 Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-Wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation Paul Stradins, Oliver Kunz, David L. Young, Yanfa Yan, Kim M. Jones, Yueqin Xu, Robert C. Reedy, Howard M. Branz, Armin … Materials Research Society	12 国際会議録 Predicting Growth Rates of SiC Epitaxial Layers Grown by Hot-Wall Chemical Vapor Deposition Danielsson, OE., Joensson, S., Henry, A., Janzen, E. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12