A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale - Mechanics of Residually Stressed Systems

A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale - Mechanics of Residually Stressed Systems

著者名:

掲載資料名:

Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1052

発行年:

2007

開始ページ:

87

終了ページ:

92

総ページ数:

6

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558999909 [1558999906]

言語:

英語

請求記号:

M23500/1052

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049369
シリーズID:	PA00000011
会議名:	Symposium on microelectromechanical systems-materials and devices
回次:	2007
会議開催地:	Boston, Massachusetts, USA
会議開催年:	2007.11.26-2007.11.28

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