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Mechanical Properties of Sputtered Silicon Oxynitride Films by Nanoindentation

著者名:
掲載資料名:
Fundamentals of nanoindentation and nanotribology IV : symposium held November 26-29, 2007, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1049
発行年:
2007
開始ページ:
175
終了ページ:
180
総ページ数:
6
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558999893 [1558999892]
言語:
英語
請求記号:
M23500/1049
資料種別:
国際会議録

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