Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science? | 東京工業大学附属図書館文献データベース

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Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science?

著者名:: B. O. Kolbesen
掲載資料名:: High purity silicon 9
シリーズ名:: ECS transactions
シリーズ巻号:: 3(4)
発行年:: 2006
開始ページ:: 361
終了ページ:: 364
総ページ数:: 4
出版情報:: Pennington, N.J.: Electrochemical Society
ISSN:: 19385862
ISBN:: 9781566775045 [1566775043]
言語:: 英語
請求記号:: E23400/3-4
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00047112
シリーズID:	PA00000034
会議名:	International Symposium on High Purity Silicon ; Meeting of the Electrochemical Society
回次:	2006 ; 210th
会議開催地:	Cancun, Mexico
会議開催年:	2006.10.29-2006.11.03

類似資料:

1 国際会議録 Delineation of Crystalline Defects in Semiconductor Substrates and Thin Films by Chemical Etching Techniques B. Kolbesen, D. Possner, J. Maehliss Electrochemical Society	7 国際会議録 Process-Induced Defects in Silicon: A Never Ending Story? Kolbesen, B.O., Cerva, H. Electrochemical Society
2 国際会議録 A Chromium-free Defect Etching Solution for Application on SOI J. Maehliss, A. Abbadie, B. Kolbesen Electrochemical Society	8 国際会議録 Influence of Silicon Defects on the Electrical Behavior of Semiconductor Power Devices Schulze, H-J., Kolbesen, B. O. MRS - Materials Research Society
3 国際会議録 Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials D. Possner, B.O. Kolbesen, H. Cerva, V. Kluppel Electrochemical Society	9 国際会議録 Impact of Defects on the Technology of Highly Integrated Circuits Kolbesen,B.O., Bergholz,W., Wendt,H. Trans Tech Publications
4 国際会議録 Defect Aspects of Advanced Device Technologies Kolbesen O. B. Kluwer Academic Publishers	10 国際会議録 RPBloX Rapid Prototyping: More Than Just Layers T. Lim, J. Corney, J. M. Ritchie, B. J. Davies American Society of Mechanical Engineers
5 国際会議録 Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates J. Maehliss, A. Abbadie, F. Brunier, B.O. Kolbesen Electrochemical Society	11 国際会議録 Silicon Crystal for Large Scale Integrated Circuits Kolbesen O. B. Martinus Nijhoff Publishers
6 国際会議録 AUTOIMMUNITY - MORE THAN THE MHC? Demaine G. A., Millward A. B., Willcox N., Thompson A., Newsom-Davis J. Springer-Verlag	12 国際会議録 Is Metallocene Polyethylene Blend with HDPE More Compatible Than with PP? Rana D., Choe S., Cho K., Lee H. B. Society of Plastics Engineers, Inc. (SPE)

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