Low Temperature Silcore Deposition of Undoped and Doped Silicon Films
- 著者名:
P. R. Fischer S. Van Aerde E. Oosterlaken B. Bozon P. M. Zagwnjn M. Bauer M. Yan W. Verweij - 掲載資料名:
- Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 3(2)
- 発行年:
- 2006
- 開始ページ:
- 203
- 終了ページ:
- 216
- 総ページ数:
- 14
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775021 [1566775027]
- 言語:
- 英語
- 請求記号:
- E23400/3-2
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |