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Study of Inhibition Characteristics of Slurry Additives in Copper CMP Using Force Spectroscopy

著者名:
M. K. Keswani
H. Lee
S. Babu
U. Patri
Y. Hong
L. Economikos
M. Goldstein
L. Borucki
A. Philipossian
Y. Zhuang
さらに 5 件
掲載資料名:
Silicon materials science and technology X
シリーズ名:
ECS transactions
シリーズ巻号:
2(2)
発行年:
2006
開始ページ:
515
終了ページ:
522
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
言語:
英語
請求記号:
E23400/2-2
資料種別:
国際会議録

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