Growth Technologies for 300mm Arsenic Heavily Doped Silicon Single Crystals
- 著者名:
H. Tu Q. Zhou G. Zhang X. Dai Z. Wu T. Jia - 掲載資料名:
- Silicon materials science and technology X
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 2(2)
- 発行年:
- 2006
- 開始ページ:
- 89
- 終了ページ:
- 94
- 総ページ数:
- 6
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774390 [156677439X]
- 言語:
- 英語
- 請求記号:
- E23400/2-2
- 資料種別:
- 国際会議録
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