Sidewall Angle Influence on the FinFET Analog Parameters

Sidewall Angle Influence on the FinFET Analog Parameters

著者名:

掲載資料名:

Microelectronics Technology and Devices : SBMICRO 2007

シリーズ名:

ECS transactions

シリーズ巻号:

9(1)

発行年:

2007

開始ページ:

37

終了ページ:

46

総ページ数:

10

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775656 [1566775655]

言語:

英語

請求記号:

E23400/9-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047130
シリーズID:	PA00000034
会議名:	International Symposium on Microelectronics Technology and Devices : SBMicro
回次:	22nd : 2007
会議開催地:	Rio deJaneiro, Brazil
会議開催年:	2007.09.03-2007.09.06

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