DEGRADATION OF CHELATING AGENTS IN HYDROGEN PEROXIDE AND APM+ SOLUTIONS

DEGRADATION OF CHELATING AGENTS IN HYDROGEN PEROXIDE AND APM+ SOLUTIONS

著者名:

掲載資料名:

Cleaning Technology in Semiconductor Device Manufacturing IX

シリーズ名:

ECS transactions

シリーズ巻号:

1(3)

発行年:

2006

開始ページ:

97

終了ページ:

104

総ページ数:

8

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774291 [1566774292]

言語:

英語

請求記号:

E23400/1-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047097
シリーズID:	PA00000034
会議名:	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
回次:	9th ; 2005
会議開催地:	Los Angeles, California, USA
会議開催年:	2005.10.00

類似資料:

1 国際会議録 CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): DECOMPOSITION OF CAs IN HYDROGEN PEROXIDE AND APM STUDIED WITH HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	7 国際会議録 EVALUATION OF CHELATE ADDED APM CLEANING SOLUTIONS Chung, S.P., Chang, K.H., Lee, K.T., Kwon, Y.M., Hah, S.R., Moon, J.T., Lee, S.I. Electrochemical Society
2 国際会議録 CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY Doll, O., Kolbesen, B. Electrochemical Society	8 国際会議録 Chelating Agent Effects on Hydrogen Incorporation in the Electrodeposition of Au-Cu Bozzini, B., Cavallotti, P.L. Electrochemical Society
3 国際会議録 Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	9 国際会議録 ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL Onsia, B., Schellkes, E., Vos, R., De Gendt, S., Doll, O., Fester, A., Kolbesen, B., Hoffman, M., Hatcher, Z., Wolke, … Electrochemical Society
4 国際会議録 Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	10 国際会議録 VPD-DSE-studies of metal impurities on silicon: a comparison of different contamination methods Metz, S., Kolbesen, B. O. Electrochemical Society
5 国際会議録 Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy Doll, O., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	11 国際会議録 A Chromium-free Defect Etching Solution for Application on SOI J. Maehliss, A. Abbadie, B. Kolbesen Electrochemical Society
6 国際会議録 Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UVIVIS-Spectroscopy Doll, O., Kolbesen, B.O. Electrochemical Society	12 国際会議録 Use of Hydrogen Peroxide for the Degradation of Sewage Sludge and Refractory Model Substances Luft, G., Stoffler, B. American Institute of Chemical Engineers

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