Multi-Scale Analysis of GaAs MOVPE Process by Using Wide-Stripe Selective Area Growth And Computational Fluid Dynamics Simulation

Multi-Scale Analysis of GaAs MOVPE Process by Using Wide-Stripe Selective Area Growth And Computational Fluid Dynamics Simulation

著者名:

掲載資料名:

State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI

シリーズ名:

ECS transactions

シリーズ巻号:

1(2)

発行年:

2006

開始ページ:

113

終了ページ:

120

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774314 [1566774314]

言語:

英語

請求記号:

E23400/1-2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047096
シリーズID:	PA00000034
会議名:	State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Symposium on Nitride and Wide Bandgap Semiconductors for Sensors, Photonics and Electronics ; Meeting of the Electrochemical Society
回次:	43rd ; 6th ; 208th
会議開催地:	Los Angeles, CA, USA
会議開催年:	2005.10.16-2005.10.21

類似資料:

1 国際会議録 Non-linear Surface Reaction Kinetics of GaAs MOVPE Explored by Selective Area Growth H. Song, M. Sugiyama, Y. Nakano, Y. Shimogaki Electrochemical Society	7 国際会議録 Simplified Modeling of ECR-RIBE Reactor for the Optimization of GaAs Etching Process with C12 Shimogaki, Y., Sugiyama, M., Nishioka, K., Nezuka, M., Nakano, Y., Tada, K., Komiyama, N. Electrochemical Society
2 国際会議録 Selective Area MOVPE for GaAs on (100) Misoriented Substrates Song, H., Song, X., Sugiyama, M., Nakano, Y., Shimogaki, Y. Electrochemical Society	8 国際会議録 Elementary Reaction Simulation of Al-CVD Using Dimethyl Aluminum Hydride Sugiyama, M., Nakajima, T., Tanaka, T., Itoh, H., Aoyama, J., Egashira, Y., Yamashita, K., Komiyama, H., Shimogaki, Y. Electrochemical Society
3 国際会議録 Two-Dimensional Simulation of the Growth Enhancement in Selective Area Metal-Organic Vapor Phase Epitaxy Mishima, Y., Kaida, N., Sugiyama, M., Shimogaki, Y., Nakano, Y. Electrochemical Society	9 国際会議録 Selective-Area Growth of GaN by MOVPE and HVPE Hiramatsu, K., Matsushima, H., Shibata, T., Sawaki, N., Tadatomo, K., Okagawa, H., Ohuchi, Y., Honda, Y., Matsue, T. MRS - Materials Research Society
4 国際会議録 Experimental and Numerical Study of InGaAsP Materials Growth Kinetics and Composition Feron, O., Sugiyama, M., Nakano, Y., Shimogaki, Y. Electrochemical Society	10 国際会議録 MOVPE GROWTH OF GaAs ON Si USING TERTIARYBUTYLARSINE Miyagaki, S., Ohkubo, S., Takai, K., Takagi, N., Kimura, M., Kikuchi, Y., Eshita, T., Takasaki, K. Materials Research Society
5 国際会議録 Reaction Chemistry of InGaAsP MOCVD Studied with FTIR Gas Monitoring and Numerical Analysis on Growth Kinetics Sugiyama, M., Shimogaki, Y., Sudo, S., Nakano, Y., Sugawara, K., Tada, K., Komiyama, H. Electrochemical Society	11 国際会議録 Theoretical Optimization of Al-CVD using Elementary Reaction Simulation Sugiyama, M., Iino, T., Nakajima, T., Tanaka, T., Itoh, H., Aoyama, J., Egashira, Y., Yamashita, K., Komiyama, H., … Electrochemical Society
6 国際会議録 Control of Indium Surface Segregation in GaAs Layer on InGap Grown by MOVPE Fukushima, Y., Nakano, Y., Shimogaki, Y. Materials Research Society	12 国際会議録 All-optical wavelength conversion with monolithically integrated Mach-Zehnder interferometer SOA switches by selective area MOVPE Song, X., Zhang, Z., Yit, F. C., Nakano, Y. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12