High-Resolution X-Ray Photoelectron Spectroscopy Study on Si₃N₄/Si Interface Structures and Its Correlation with Hysteresis in C(V) Curves
- 著者名:
M. Higuchi A. Teramoto M. Komura S. Shinagawa E. Ikenaga H. Nohira K. Kobayashi T. Hattori S. Sugawa T. Ohmi - 掲載資料名:
- Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 1(1)
- 発行年:
- 2005
- 開始ページ:
- 267
- 終了ページ:
- 276
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774307 [1566774306]
- 言語:
- 英語
- 請求記号:
- E23400/1-1
- 資料種別:
- 国際会議録
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10
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