Nano-Patterning of GST Thin Films by Self-Assembled Di-Block Copolymers Lithography

Nano-Patterning of GST Thin Films by Self-Assembled Di-Block Copolymers Lithography

著者名:

Pietro La Fata

Rosaria A. Puglisi

Salvatore Lombardo

Stefania Privitera

Maria Grazia Grimaldi

Emanuele Rimini

さらに 1 件

掲載資料名:

Materials and processes for nonvolatile memories II : symposium held April 10-13, 2007, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

997

発行年:

2007

開始ページ:

323

終了ページ:

330

総ページ数:

8

出版情報:

Warrendale, Pa.: Materiaeditors, Tingkai Li ... [et al.] ls Research Society

ISSN:

02729172

ISBN:

9781558999572 [1558999574]

言語:

英語

請求記号:

M23500/997

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00048534
シリーズID:	PA00000011
会議名:	MRS Spring Meeting ; Symposium on Materials and Processes for Nonvolatile Memories
回次:	2007 ; 2nd
会議開催地:	San Francisco, California, USA
会議開催年:	2007.04.10-2007.04.13

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