Contact Model for a Pad Asperity and a Wafer Surface in the Presence of Abrasive Particles for Chemical Mechanical Polishing
- 著者名:
- 掲載資料名:
- Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 991
- 発行年:
- 2007
- 開始ページ:
- 343
- 終了ページ:
- 348
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558999510 [1558999515]
- 言語:
- 英語
- 請求記号:
- M23500/991
- 資料種別:
- 国際会議録
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12
国際会議録
Polish Rate, Pad Surface Morphology and Pad Conditioning in Oxide Chemical Mechanical Polishing
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