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Effect of Wettability of Poly Silicon on CMP Behavior

著者名:
Young-Jae Kang
Bong-Kyun Kang
In-Kwon Kim
Jin-Goo Park
Yi-Koan Hong
Sang-Yeob Han
Seong-Kyu Yun
Bo-Un Yoon
Chang-Ki Hong
さらに 4 件
掲載資料名:
Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
991
発行年:
2007
開始ページ:
275
終了ページ:
282
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999510 [1558999515]
言語:
英語
請求記号:
M23500/991
資料種別:
国際会議録

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