Self-Aligned Nanocrystalline Silicon Thin-Film Transistor with Deposited n⁺ Source/Drain Layer

Self-Aligned Nanocrystalline Silicon Thin-Film Transistor with Deposited n⁺ Source/Drain Layer

著者名:

掲載資料名:

Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

989

発行年:

2007

開始ページ:

255

終了ページ:

260

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558999497 [1558999493]

言語:

英語

請求記号:

M23500/989

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00048532
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2007
会議開催地:	San Francisco, California
会議開催年:	2007.04.09-2007.04.13

類似資料:

1 国際会議録 Evolution of Nanocrystalline Silicon Layers Deposited at 150℃ for Thin Film Transistor Channels Cheng, I-Chun, Allen, Steven, Wagner, Sigurd Materials Research Society	7 国際会議録 Stability of Amorphous Silicon Thin-Film Transistors Under Prolonged High Compressive Strain Jian-Zhang Chen, I-Chun Cheng, Sigurd Wagner, Warren Jackson, Craig Perlov, Carl Taussig Materials Research Society
2 国際会議録 Monolithically Integrated p- and n-Channel Thin Film Transistors of Nanocrystalline Silicon on Plastic Substrates Cheng, I-Chun, Wagner, Sigurd Materials Research Society	8 国際会議録 Self-Aligned Amorphous Silicon Thin Film Transistors With Mobility Above 1 cm2V-1s-1 Fabricated at 300oC Kunigunde H. Cherenack, Alex Z. Kattamis, Bahman Hekmatshoar, James C. Sturm, Sigurd Wagner Materials Research Society
3 国際会議録 Hydrogen in Ultralow Temperature SiO2 for Nanocrystalline Silicon Thin Film Transistors Kattamis, Alex, Cheng, I-Chun, Allen, Steve, Wagner, Sigurd Materials Research Society	9 国際会議録 Thin film transistors made of nanocrystalline silicon for CMOS on plastic Cheng, I-C., Wagner, S. SPIE-The International Society for Optical Engineering
4 国際会議録 Gate Dielectrics for Thin Film Transistor of Nanocrystalline Silicon Deposited at 150℃ Cheng, I.-C., Wagner, S. Electrochemical Society	10 国際会議録 P-channel Polycrystalline Silicon Thin Film Transistors on Steel Foil Substrates Wu, Ming, Wagner, Sigurd Materials Research Society
5 国際会議録 A Novel Self-Aligned Field Induced Drain Polycrystalline Silicon Thin Film Transistor Fabricated by Using a Selective Side Etch Process Ta-Chuan Liao, Chun-Yu Wu, Feng-Tso Chien, Chun-Chien Tsai, Hsiu-Hsin Chen, Chung-Yuan Kung, Huang-Chung Cheng Materials Research Society	11 国際会議録 Amorphous Silicon Thin Film Transistors on Kapton Fibers Bonderover, Eitan, Wagner, Sigurd, Suo, Zhigang Materials Research Society
6 国際会議録 High Electron Mobility TFTs of Nanocrystalline Silicon Deposited at 150°C on Plastic Foil Cheng, I-Chun, Wagner, Sigurd, Bae, Sanghoon, Fonash, Stephen J. Materials Research Society	12 国際会議録 Nanocrystalline Silicon TFTs With 50 nm Thick Deposited Channel Layer, 10 cm2 /Vs Electron Mobility and 108 On/Off Current Ratio Min, Robert B., Wagner, Sigurd Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12