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Performance of Thin-Film Silicon MEMS on Flexible Plastic Substrates

著者名:
掲載資料名:
Amorphous and polycrystalline thin-film silicon science and technology--2007 : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
989
発行年:
2007
開始ページ:
219
終了ページ:
224
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999497 [1558999493]
言語:
英語
請求記号:
M23500/989
資料種別:
国際会議録

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