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Characterization of radio-frequency sputtered AlN films by spectroscopic ellipsometry

著者名:
D. Huang ( Univ. of Puerto Rico (USA) )
K. Uppireddi ( Univ. of Puerto Rico (USA) )
V. M. Pantojas ( Univ. of Puerto Rico (USA) )
W. Otano-Rivera ( Univ. of Puerto Rico (USA) )
B. R. Weiner ( Univ. of Puerto Rico (USA) )
G. Morell ( Univ. of Puerto Rico (USA) )
さらに 1 件
掲載資料名:
Nanocoatings : 26-27 August 2007, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6647
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467959 [0819467952]
言語:
英語
請求記号:
P63600/6647
資料種別:
国際会議録

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