Characterization of AlF3 thin films in the ultraviolet by magnetron sputtering of aluminum target
- 著者名:
- B.-H. Liao ( National Central Univ. (Taiwan) )
- M.-C. Liu ( National Central Univ. (Taiwan) )
- C.-C. Lee ( National Central Univ. (Taiwan) )
- 掲載資料名:
- Nanoengineering : fabrication, properties, optics, and devices IV : 27-30 August 2007, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6645
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467935 [0819467936]
- 言語:
- 英語
- 請求記号:
- P63600/6645
- 資料種別:
- 国際会議録
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