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Surface metrology with a stitching Shack-Hartmann profilometric head

著者名:
J. Floriot ( Imagine Optic (France) )
X. Levecq ( Imagine Optic (France) )
S. Bucourt ( Imagine Optic (France) )
M. Thomasset ( Synchrotron Soleil (France) )
F. Polack ( Synchrotron Soleil (France) )
M. Idir ( Synchrotron Soleil (France) )
P. Mercere ( Synchrotron Soleil (France) )
S. Brochet ( Synchrotron Soleil (France) )
T. Moreno ( Synchrotron Soleil (France) )
さらに 4 件
掲載資料名:
Optical Measurement Systems for Industrial Inspection V
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6616
発行年:
2007
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467584 [0819467588]
言語:
英語
請求記号:
P63600/6616
資料種別:
国際会議録

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