Process latitude dependency on local photomask haze defect in 70-nm binary intensity mask
- 著者名:
Y. -M. Kang ( Hanyang Univ. (South Korea) ) S. -J. Kim ( Hanyang Univ. (South Korea) ) J. -B. Park ( Hanyang Univ. (South Korea) ) W. Chang ( Hanyang Univ. (South Korea) ) S. -W. Park ( Hanyang Univ. (South Korea) ) J. -S. Kim ( Seoul National Univ. (South Korea) ) H. -K. Cho ( Samsung Electronics Co., Ltd. (South Korea) ) H. -K. Oh ( Hanyang Univ. (South Korea) ) - 掲載資料名:
- Photomask and next-generation lithography mask technology XIV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6607
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467454 [0819467456]
- 言語:
- 英語
- 請求記号:
- P63600/6607
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Haze detection and haze-induced process latitude variation for low-ki 193 nm lithography [6349-105]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
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